The successful launch of viable MEMs product hinges on MEMS reliability the reliability and qualification for MEMs based products is not widely understood. Companies that have a deep understanding of MEMs reliability view the information as a competitive advantage and are reluctant to share it. MEMs Reliability focuses on the reliability and manufacturability of MEMS at a fundamental level by addressing process development and characterization material property characterization failure mechanisms and physics of failure (POF) design strategies for improving yield design for reliability (DFR) packaging and testing.