As rapid technological developments occur in electronics photonics mechanics chemistry and biology the demand for portable lightweight integrated microsystems is relentless. These devices are getting exponentially smaller increasingly used in everything from video games hearing aids and pacemakers to more intricate biomedical engineering and military applications. Edited by Kris Iniewski a revolutionary in the field of advanced semiconductor materials Integrated Microsystems: Electronics Photonics and Biotechnology focuses on techniques for optimized design and fabrication of these intelligent miniaturized devices and systems. Composed of contributions from experts in academia and industry around the world this reference covers processes compatible with CMOS integrated circuits which combine computation communications sensing and actuation capabilities. Light on math and physics with a greater emphasis on microsystem design and configuration and electrical engineering this book is organized in three sections-Microelectronics and Biosystems Photonics and Imaging and Biotechnology and MEMs. It addresses key topics including physical and chemical sensing imaging smart actuation and data fusion and management. Using tables figures and equations to help illustrate concepts contributors examine and explain the potential of emerging applications for areas including biology nanotechnology micro-electromechanical systems (MEMS) microfluidics and photonics.